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Mipox Wafer Edge Polishing Equipment

Mipox WaferEdgePolisher boasts a track record of over 200 units delivered, primarily to SI wafer manufacturers and reclaimed wafer manufacturers.

Benefits of Tape Edge Polisher - Minimal damage to the wafer - Removal of films (e.g., SiO2) on the wafer edge is possible - Chemical-free processing - Easy utility connection - Capable of shaping various edge geometries - Both rough grinding and fine polishing are possible - Top edge polishing is possible - Can polish difficult materials such as SiC and GaN - Compatible with notches and orifices

  • Wafer processing/polishing equipment
  • Wafer edge polishing machine

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